TY  - BOOK
AU  - Lyshevski,Sergey Edward
TI  - Mems and nems: systems, devices and structures 
T2  - Nano- and Microscience, Engineering, Technology and Medicine Series
SN  - 0849312620
U1  - 621.381 21 ed.
PY  - 2002///
CY  - Boca Raton, Fla.
PB  - CRC Press
KW  - Sistemas Microelectromecánicos
N1  - Incluye referencias bibliográficas, índice, etc; Cap. 1. Overview and introduction -- 2. New trends in engineering and science: Micro- and nanoscale systems -- 3. Fundamentals of mems fabrication -- 4. Divising and synthesis of mems and nems -- 5. Modeling of micro- and nanoscale electromechanical systems, devices and structures -- 6. Nanosystems, quantum mechanics and models -- 7. Control of microelectromechanical systems -- 8. Case studies: Synthesis, analysis, fabrication and computer- aided-design of mems
ER  -