Lyshevski, Sergey Edward <br/><br/>
Mems and nems :  systems, devices and structures / 
Sergey Edward lyshevski. 
 - Boca Raton, Fla. :  CRC Press,  2002. 
 - 461 p. :  il., fot. byn., grafs., diagrs., etc. 
 - Nano- and Microscience, Engineering, Technology and Medicine Series .
<br/><br/>Incluye referencias bibliográficas, índice, etc. 
<br/><br/>Cap. 1. Overview and introduction -- 2. New trends in engineering and science: Micro- and nanoscale systems -- 3. Fundamentals of mems fabrication -- 4. Divising and synthesis of mems and nems -- 5. Modeling of micro- and nanoscale electromechanical systems, devices and structures -- 6. Nanosystems, quantum mechanics and models -- 7. Control of microelectromechanical systems -- 8. Case studies: Synthesis, analysis, fabrication and computer- aided-design of mems. 
<br/><br/><br/>Disponible en la Colección General. 
<br/><br/><label>ISBN: </label>0849312620  (pasta dura) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Sistemas Microelectromecánicos
<br/><br/><label>Dewey Class. No.: </label>621.381  / L993