Mems and nems :
Lyshevski, Sergey Edward
Mems and nems : systems, devices and structures / Sergey Edward lyshevski. - Boca Raton, Fla. : CRC Press, 2002. - 461 p. : il., fot. byn., grafs., diagrs., etc. - Nano- and Microscience, Engineering, Technology and Medicine Series .
Incluye referencias bibliográficas, índice, etc.
Cap. 1. Overview and introduction -- 2. New trends in engineering and science: Micro- and nanoscale systems -- 3. Fundamentals of mems fabrication -- 4. Divising and synthesis of mems and nems -- 5. Modeling of micro- and nanoscale electromechanical systems, devices and structures -- 6. Nanosystems, quantum mechanics and models -- 7. Control of microelectromechanical systems -- 8. Case studies: Synthesis, analysis, fabrication and computer- aided-design of mems.
Disponible en la Colección General.
0849312620 (pasta dura)
Sistemas Microelectromecánicos
621.381 / L993
Mems and nems : systems, devices and structures / Sergey Edward lyshevski. - Boca Raton, Fla. : CRC Press, 2002. - 461 p. : il., fot. byn., grafs., diagrs., etc. - Nano- and Microscience, Engineering, Technology and Medicine Series .
Incluye referencias bibliográficas, índice, etc.
Cap. 1. Overview and introduction -- 2. New trends in engineering and science: Micro- and nanoscale systems -- 3. Fundamentals of mems fabrication -- 4. Divising and synthesis of mems and nems -- 5. Modeling of micro- and nanoscale electromechanical systems, devices and structures -- 6. Nanosystems, quantum mechanics and models -- 7. Control of microelectromechanical systems -- 8. Case studies: Synthesis, analysis, fabrication and computer- aided-design of mems.
Disponible en la Colección General.
0849312620 (pasta dura)
Sistemas Microelectromecánicos
621.381 / L993